Characterization of arsenphosphosilicate glass films for VLSI applications—Part I. Composition and physicochemical properties

✍ Scribed by L. Zambov; I. Nedev; Y. Yanakiev

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 573 KB
• Volume: 34
• Category: Article
• ISSN: 0038-1101
• DOI: 10.1016/0038-1101(91)90062-4