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Characterization of aluminum films on a polycarbonate substrate

✍ Scribed by Robert J. De Angelis; Robert J. Jacob; James E. Funk


Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
849 KB
Volume
202
Category
Article
ISSN
0040-6090

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The measurements of thin-film mechanical properties are generally influenced by the elastic and plastic responses of substrates and consequently may be inaccurate. Thus in this study, the effects of three different substrates, including sapphire, glass and polyimide, on the mechanical characterizati