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Characterization of AlN/SiC Epitaxial Wafers Fabricated by Hydride Vapour Phase Epitaxy

✍ Scribed by Melnik, Yu. ;Tsvetkov, D. ;Pechnikov, A. ;Nikitina, I. ;Kuznetsov, N. ;Dmitriev, V.

Publisher: John Wiley and Sons
Year: 2001
Tongue: English
Weight: 98 KB
Volume: 188
Category: Article
ISSN: 0031-8965
DOI: 10.1002/1521-396x(200111)188:1<463::aid-pssa463>3.0.co;2-h

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