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Characterization of a liquid-phase-epitaxy-grown Al0.2Ga0.8As film on a GaAs (1 1 1) substrate by RBS, channeling and PIGE analyses

โœ Scribed by G. Kuri; P.V. Satyam; B. Sundaravel; K. Sekar; D.P. Mahapatra; B.N. Dev


Book ID
114170135
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
208 KB
Volume
140
Category
Article
ISSN
0168-583X

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Combined effects of substrate compliance
โœ Luis A Zepeda-Ruiz; W Henry Weinberg; Dimitrios Maroudas ๐Ÿ“‚ Article ๐Ÿ“… 2003 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 532 KB

A systematic theoretical analysis is presented of the combined effects of substrate compliance and film compositional grading on the relaxation of strain due to lattice mismatch in layer-by-layer semiconductor heteroepitaxy. The analysis is based on a combination of continuum elasticity theory and a