Characterization for N- and P-type 3C-SiC on Si (100) substrate with thermal anneal and pulsed excimer laser anneal

✍ Scribed by Lee, Kung-Yen; Chang, Yu-Hao; Huang, Yan-Hao; Huang, Chih-Fang; Chung, Cheng Yueh; Zhao, Feng

• Book ID: 123161240
• Publisher: Elsevier Science
• Year: 2013
• Tongue: English
• Weight: 765 KB
• Volume: 266
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2012.11.059