Characterization and simulation studies on high tilt ion implantation for precision halo implant applications

✍ Scribed by B.N. Guo; Z.Y. Zhao; S. Falk; J. Liu; K.H. Shim; U. Jeong; S. Mehta

• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 222 KB
• Volume: 261
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2007.03.029