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Characterization and electrical behavior of new lithium chalcoborate thin films

โœ Scribed by M. Kbala; M. Makyta; A. Levasseur; P. Hagenmuller

Publisher
Elsevier Science
Year
1985
Tongue
English
Weight
387 KB
Volume
15
Category
Article
ISSN
0167-2738

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โœ J.B. Bates; N.J. Dudney; G.R. Gruzalski; R.A. Zuhr; A. Choudhury; C.F. Luck; J.D ๐Ÿ“‚ Article ๐Ÿ“… 1993 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 407 KB

Amorphous oxide and oxynitride lithium electrolyte thin films were synthesized by r.f. magnetron sputtering of lithium silicates and lithium phosphates in Ar, Ar+O x, Ar+N" or N 2 . The composition, structure, and electrical properties of the films were characterized using ion and electron beam, X-r