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Characterization and analysis of two-dimensional GaAs-based photonic crystal nanocavities at room temperature

โœ Scribed by Y.S. Peng; B. Xu; X.L. Ye; J.B. Niu; R. Jia; Z.G. Wang

Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
303 KB
Volume
87
Category
Article
ISSN
0167-9317

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A simple and non-destructive optical characterizing method for the 2D photonic crystal (PC) slab was carried out by using specular spectroscopic ellipsometry. The rigorous coupled-wave analysis (RCWA) was further applied to analyze the measured ellipsometric parameters and then to simulate the struc