Optical characterization of two-dimensional photonic crystals based on spectroscopic ellipsometry with rigorous coupled-wave analysis
✍ Scribed by Chun-Hung Lin; Hsuen-Li Chen; Wen-Chi Chao; Chung-I Hsieh; Wen-Huei Chang
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 620 KB
- Volume
- 83
- Category
- Article
- ISSN
- 0167-9317
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✦ Synopsis
A simple and non-destructive optical characterizing method for the 2D photonic crystal (PC) slab was carried out by using specular spectroscopic ellipsometry. The rigorous coupled-wave analysis (RCWA) was further applied to analyze the measured ellipsometric parameters and then to simulate the structure of the measured photonic crystal. A 2D square lattice of silicon rods fabricated by electron-beam lithography on the silicon substrate was used as a testing sample in this study. The reflectance spectrum of the characterized 2D PC was also simulated by RCWA to reflect its photonic bandgap behavior directly.