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Characterization and analysis of DLC films with different thickness deposited by RF magnetron PECVD

✍ Scribed by Yujie Huang; Qi Wang; Mei Wang; Zhenyi Fei; Musen Li

Book ID: 113107611
Publisher: Nonferrous Metals Society of China
Year: 2012
Tongue: English
Weight: 491 KB
Volume: 31
Category: Article
ISSN: 1001-0521
DOI: 10.1007/s12598-012-0491-x

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