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Characteristics of NEMS Piezoresistive Silicon Nanowires Pressure Sensors With various Diaphragm Layers

✍ Scribed by Liang Lou; Songsong Zhang; Lishiah Lim; Woo-Tae Park; Hanhua Feng; Dim-Lee Kwong; Chengkuo Lee

Book ID: 119355821
Publisher: Elsevier
Year: 2011
Tongue: English
Weight: 868 KB
Volume: 25
Category: Article
ISSN: 1877-7058
DOI: 10.1016/j.proeng.2011.12.354

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