Characteristics of amorphous silicon precipitated by means of argon excimer laser irradiation on SiC films

✍ Scribed by M. Ohmukai; H. Naito; M. Okuda; K. Kurosawa

• Book ID: 115991177
• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 277 KB
• Volume: 202
• Category: Article
• ISSN: 0022-3093
• DOI: 10.1016/0022-3093(96)00153-6