Characteristics of thin-film transistors based on silicon nitride passivation by excimer laser direct patterning

✍ Scribed by Chen, Chao-Nan; Huang, Jung-Jie

• Book ID: 121472411
• Publisher: Elsevier Science
• Year: 2013
• Tongue: English
• Weight: 927 KB
• Volume: 529
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2012.06.022