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Characteristics of amorphous carbon films prepared by hybrid RF (195kHz) plasma triggered by shunting arc discharge

โœ Scribed by Takaki, K.; Yukimura, K.; Suda, Y.; Ogiso, H.; Nakano, S.

Book ID
121453202
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
991 KB
Volume
229
Category
Article
ISSN
0257-8972

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