Characteristics of aluminum oxinitride film grown by plasma-enhanced atomic layer deposition as the insulator of an electroluminescent device

✍ Scribed by Jung Wook Lim; Sun Jin Yun; Jin Ho Lee

• Book ID: 119923861
• Publisher: Society for Information Display
• Year: 2003
• Tongue: English
• Weight: 202 KB
• Volume: 11
• Category: Article
• ISSN: 1071-0922
• DOI: 10.1889/1.1825682