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Characterisation of TiN coatings and of the TiN/Si interface by X-ray photoelectron spectroscopy and Auger electron spectroscopy

✍ Scribed by P.-Y. Jouan; M.-C. Peignon; Ch. Cardinaud; G. Lempérière


Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
625 KB
Volume
68
Category
Article
ISSN
0169-4332

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