Characterisation of ion-implanted pn-junction diodes in β-SiC films grown on (100) silicon substrates by reactive magnetron sputtering

✍ Scribed by Karlsteen, M.; Wahab, Q.; Willander, M.; Sundgren, J.-E.; Holmén, G.

• Book ID: 122867848
• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 224 KB
• Volume: 1
• Category: Article
• ISSN: 0925-9635
• DOI: 10.1016/0925-9635(92)90149-I