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Characterisation of an RF power splitter for multi-tile PECVD systems application

✍ Scribed by T. Michna; A.R. Ellingboe

Book ID: 118426815
Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 249 KB
Volume: 11
Category: Article
ISSN: 1567-1739
DOI: 10.1016/j.cap.2011.06.021

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