Characterisation of an industrial plasma immersion ion implantation reactor with a Langmuir probe and an energy-selective mass spectrometer

✍ Scribed by V Kaeppelin; M Carrère; F Torregrosa; G Mathieu

• Book ID: 108423052
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 170 KB
• Volume: 156
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/s0257-8972(02)00075-0