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Changes in elastic deformation of strained Si by microfabrication

✍ Scribed by Keisuke Arimoto; Daisuke Furukawa; Junji Yamanaka; Kiyokazu Nakagawa; Kentarou Sawano; Shinji Koh; Yasuhiro Shiraki; Noritaka Usami

No coin nor oath required. For personal study only.

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