Corrigendum to ‘‘Changes in elastic deformation of strained si by microfabrication’’: [Materials Science in Semiconductor Processing 8 (2005) 181–185]

✍ Scribed by Keisuke Arimoto; Daisuke Furukawa; Junji Yamanaka; Kiyokazu Nakagawa; Kentarou Sawano; Shinji Koh; Yasuhiro Shiraki; Noritaka Usami

• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 60 KB
• Volume: 8
• Category: Article
• ISSN: 1369-8001
• DOI: 10.1016/j.mssp.2006.04.002