Changes in chemical composition and nanostructure of SiC thin films prepared by PECVD during thermal annealing

✍ Scribed by Künle, Matthias ;Janz, Stefan ;Nickel, Klaus Georg ;Eibl, Oliver

• Publisher: John Wiley and Sons
• Year: 2011
• Tongue: English
• Weight: 875 KB
• Volume: 208
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/pssa.201026649