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Change of electron injection in irradiated dielectrics caused by surface charging

✍ Scribed by V.A. Starodubtsev; T.V. Fursa; G.V. Erofeeva


Publisher
Elsevier Science
Year
1988
Tongue
French
Weight
347 KB
Volume
21
Category
Article
ISSN
0304-3886

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## Abstract Energetic beams of electrons and ions are widely used to probe the microscopic properties of materials. Irradiation with charged beams in scanning electron microscopes (SEM) and focused ion beam (FIB) systems may result in the trapping of charge at irradiation induced or pre‐existing de