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Causes of cracking of vacuum deposited thick amorphous silicon film

โœ Scribed by V.S. Avrutin; N.F. Izumskaya; Y.M. Hartman; A.V. Andreeva; A.F. Vyatkin; N.N. Melnik


Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
461 KB
Volume
39
Category
Article
ISSN
0921-5107

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