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Cation Mass Spectrometer (CMS): recent developments for quantitative analyses of positive and negative secondary ions

โœ Scribed by P. Philipp; T. Wirtz; H.-N. Migeon; H. Scherrer


Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
163 KB
Volume
231-232
Category
Article
ISSN
0169-4332

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The purpose of this study was to design a quadrupole secondary ion mass spectrometer for simultaneous detection of both positive and negative ions of different mass. An original setup based on a quadrupole electrostatic deflector configuration that allows energy and spatial separation of all types o