Cathodoluminescence study of micro-crack-induced stress relief for AlN films on Si(111)

✍ Scribed by G. Sarusi; O. Moshe; S. Khatsevich; D. H. Rich; J. Salzman; B. Meyler; M. Shandalov; Y. Golan

• Book ID: 107453836
• Publisher: Springer US
• Year: 2006
• Tongue: English
• Weight: 156 KB
• Volume: 35
• Category: Article
• ISSN: 0361-5235
• DOI: 10.1007/s11664-006-0328-1