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Evaluation of critical stress intensity for crack initiation and rising R-curve behavior in wurtzitic AlN film grown on (001)Si substrate

✍ Scribed by Zhu, Wenliang; Leto, Andrea; Hashimoto, Ken-ya; Pezzotti, Giuseppe


Book ID
123530629
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
516 KB
Volume
537
Category
Article
ISSN
0040-6090

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