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Cathodoluminescence of highly and heavily boron doped (100) homoepitaxial diamond films

โœ Scribed by Baron, C.; Wade, M.; Deneuville, A.; Jomard, F.; Chevallier, J.

Book ID
122996873
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
311 KB
Volume
15
Category
Article
ISSN
0925-9635

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## Abstract Heavily boron doped 1.8 to 2.4 ยตm thick homoepitaxial diamond films with 1.5 ร— 10^21^ cm^โ€“3^ โ‰ค [B] โ‰ค 1.75 ร— 10^21^ cm^โ€“3^ have been deposited directly on their (100) Ib substrates at 830 ยฐC. Their cathodoluminescence spectra probe the controlled thicknesses from 0.28 to 2.8 ยตm, therefor