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Cathodoluminescence imaging of semiconducting diamond formed by plasma CVD

โœ Scribed by Yoshihiro Yokota; Hiroshi Kawarada; Jing Sheng Ma; Kazuhito Nishimura; Akio Hiraki

Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
587 KB
Volume
103
Category
Article
ISSN
0022-0248

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โœ J.L. Kaae; P.K. Gantzel; J. Chin; W.P. West ๐Ÿ“‚ Article ๐Ÿ“… 1990 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 92 KB

We have investi ated the effects of reactant residence time on the properties of microwav+a88isted CV % diamond films. Using a constant process pressure of 40 Torr and gas composition of 1% CHb in Hr? the total gas flow rate was adjusted from 25 to 800 seem. For OUT reactor, this correspond8 to res