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Cathode poisoning during reactive arc evaporation of titanium in nitrogen atmosphere

✍ Scribed by P Hovsepian; D Popov


Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
411 KB
Volume
45
Category
Article
ISSN
0042-207X

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The deposition parameters of reactive cathodic arc are correlated with processes at the surface of the composite Al-Cr targets and the nucleation and phase formation of the synthesized Al-Cr-O layers. The oxygen pressure and the pulsed operation of the arc current influence the formation of intermet