AIXTRON cassette-to-cassette MOCVD debut
๐
Article
๐
1996
๐
Elsevier Science
๐
English
โ 307 KB
## At ICMOVPE, Cardiff, in June, AIXTRON introduced the AIX 240012600 Gen 3, an updated version of the multiwafer MOCVD Planetary Reactor ยฎ for "production scale manufacturing with true Cassette-to-Cassette loading of wafers, offering higher uptime and throughput and easier handling and flexibilit