AIXTRON cassette-to-cassette MOCVD debuts

• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 307 KB
• Volume: 9
• Category: Article
• ISSN: 0961-1290
• DOI: 10.1016/s0961-1290(96)80225-0

✦ Synopsis

At ICMOVPE, Cardiff, in June, AIXTRON introduced the AIX 240012600 Gen 3, an updated version of the multiwafer MOCVD Planetary

Reactor ® for "production scale manufacturing with true Cassette-to-Cassette loading of wafers, offering higher uptime and throughput and easier handling and flexibility," the company said.