Carrier concentration profiles in 6H-SiC
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F. Giannazzo; P. Musumeci; L. Calcagno; A. Makhtari; V. Raineri
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Article
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2001
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Elsevier Science
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English
โ 161 KB
We have used scanning capacitance microscopy to determine two-dimensional carrier distributions in 6H-SiC on both epitaxial layers and implanted samples. Measurements were carried out on cross-sections using metal-covered Si tips. The sample preparation, surface passivation and tip selection have be