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Carbonization of porous silicon optical gas sensors for enhanced stability and sensitivity

✍ Scribed by Torres-Costa, V. ;Salonen, J. ;Jalkanen, T. M. ;Lehto, V.-P. ;Martín-Palma, R. J. ;Martínez-Duart, J. M.

Publisher
John Wiley and Sons
Year
2009
Tongue
English
Weight
276 KB
Volume
206
Category
Article
ISSN
0031-8965

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✦ Synopsis

Abstract

Nanostructured porous silicon (PS) optical filters have been widely proposed for their use in biological and chemical sensing applications. Porous silicon, however, presents a reactive surface that must be adequately passivated in order to achieve the required chemical stability mandatory for sensing applications. In the present work, thermal carbonization by acetylene decomposition (TCAD) is shown to provide effective passivation of PS internal surface, as well as an enhancement of the device's sensitivity to certain species. Moreover, it is shown that the TCAD process, as opposed to more common oxidation treatments, has only minor effects on the optical properties of PS. Thus, the optical performance of PS interference filters is preserved after the carbonization process. (© 2009 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

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