Modelling the pressure and temperature sensitivity of an optically excited micromachined silicon sensor for permanently installed downhole monitoring systems
✍ Scribed by B.S. Douma; P. Eigenraam; P. Hatlem
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 448 KB
- Volume
- 31
- Category
- Article
- ISSN
- 0924-4247
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✦ Synopsis
An analytical model of the pressure and temperature sensitivity of a permanently installed downhole monitoring sensor is presented. The sensing concept is embodied in a micromachined silicon resonator using optical excitation and interrogation. The relation between pressure and resonant frequency is modelled in three stages: (I) modelling of two relevant resonances of the resonator structure; (2) modelling of the sensor tube deformation as a function of pressure; (3) modelling of the effect of the sensor tube deformation on the two resonant frequencies. The model calculation is compared both with finite-element calculations and with validation measurements. The results provide a framework for understanding and hence optimizing the pressure sensor performance.