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Carbon nitride films on orthopedic substrates

✍ Scribed by Broitman, E; Macdonald, W; Hellgren, N; Radnóczi, G; Czigány, Zs; Wennerberg, A; Jacobsson, M; Hultman, L

Book ID
122212115
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
786 KB
Volume
9
Category
Article
ISSN
0925-9635

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Amorphous carbon nitride thin films were deposited on polymer substrates using radio frequency (rf) plasma in a mixture of nitrogen (N 2 ) and acetylene (C 2 H 2 ) gasses. The samples were prepared at different rf plasma power (350, 400, 450, 500, and 550 W), at constant plasma exposure time of 10 m