Carbon-K NEXAFS measurements of a-CNx films formed from decomposition of BrCN in electron cyclotron resonance plasmas of He, Ne, and Ar

✍ Scribed by Akira Wada; Katsuaki Koshimura; Masahito Niibe; Hidetoshi Saitoh; Kazuhiro Kanda; Haruhiko Ito

• Book ID: 116672925
• Publisher: Elsevier Science
• Year: 2012
• Tongue: English
• Weight: 771 KB
• Volume: 358
• Category: Article
• ISSN: 0022-3093
• DOI: 10.1016/j.jnoncrysol.2011.09.011