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Carbon doping and etching in GaxIn1−xAsyP1−yon GaAs substrates using CBr4by metalorganic chemical vapor deposition

✍ Scribed by Kouta Tateno; Chikara Amano


Book ID
107457998
Publisher
Springer US
Year
1999
Tongue
English
Weight
331 KB
Volume
28
Category
Article
ISSN
0361-5235

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