𝔖 Bobbio Scriptorium
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Capacitive thin film gas sensor with signal processing system for determination of SO2

✍ Scribed by J. Lin; E. Obermeier


Book ID
108028782
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
311 KB
Volume
16
Category
Article
ISSN
0925-4005

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Thin tin oxide film with nano-size particle was prepared on silicon substrate by hydrothermal synthetic method and successive sol-gel spin coating method. The fabrication method of tin oxide film with ultrafine nano-size crystalline structure was tried to be applied to fabrication of micro-gas senso