Can Si(113) wafers be an alternative to Si(001)?

✍ Scribed by H.-J. Müssig; J. Dabrowski; K.-E. Ehwald; P. Gaworzewski; A. Huber; U. Lambert

• Book ID: 108411161
• Publisher: Elsevier Science
• Year: 2001
• Tongue: English
• Weight: 948 KB
• Volume: 56
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(00)00527-x