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Metal-induced negative oxide charge detected by an alternating current surface photovoltage in thermally oxidized Fe-contaminated n-type Si (001) wafers

✍ Scribed by Hirofumi Shimizu; Tomohiro Otsuki


Book ID
113937359
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
511 KB
Volume
520
Category
Article
ISSN
0040-6090

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