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Calculation of the depth profiles associated with high energy ion implication

✍ Scribed by AF Burenkov; FF Komarov

Book ID: 118367597
Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 318 KB
Volume: 42
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(91)90068-t

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