Calculation of ion and fast atom contributions to the sputtering non-uniformity of the target with a surface relief in glow discharge

✍ Scribed by Kristya, V. I.; Tun, Ye Naing

• Book ID: 125394210
• Publisher: Pleiades Publishing
• Year: 2014
• Tongue: English
• Weight: 441 KB
• Volume: 8
• Category: Article
• ISSN: 1027-4510
• DOI: 10.1134/S1027451014020165