Calculation of the flow of sputtered atoms returning to a target with a surface relief during sputtering in glow discharge

✍ Scribed by V. I. Kristya

• Book ID: 110202876
• Publisher: Pleiades Publishing
• Year: 2008
• Tongue: English
• Weight: 163 KB
• Volume: 2
• Category: Article
• ISSN: 1027-4510
• DOI: 10.1134/s1027451008020080