✦ LIBER ✦

Calculation of channeling effects during ion implantation using the Boltzmann transport equation

✍ Scribed by Giles, M.D.; Gibbons, J.F.

Book ID: 114595287
Publisher: IEEE
Year: 1985
Tongue: English
Weight: 829 KB
Volume: 32
Category: Article
ISSN: 0018-9383
DOI: 10.1109/t-ed.1985.22223

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Ion Implantation Calculations in Two Dim

Ion Implantation Calculations in Two Dimensions Using the Boltzmann Transport Equation

✍ Giles, M.D. 📂 Article 📅 1986 🏛 IEEE 🌐 English ⚖ 725 KB

High energy ion range and deposited ener

High energy ion range and deposited energy calculation using the Boltzmann–Fokker–Planck splitting of the Boltzmann transport equation

✍ I.E Mozolevski 📂 Article 📅 2001 🏛 Elsevier Science 🌐 English ⚖ 151 KB

Modeling of high energy ion implantation

Modeling of high energy ion implantation based on splitting of the Boltzmann transport equation

✍ Igor E Mozolevski 📂 Article 📅 2002 🏛 Elsevier Science 🌐 English ⚖ 194 KB

A multiple pass application of the Boltz

A multiple pass application of the Boltzmann transport equation for calculating ion implantation profiles at low energies

✍ M.D. Giles; J.F. Gibbons 📂 Article 📅 1983 🏛 Elsevier Science ⚖ 299 KB

High-energy ion implantation simulation

High-energy ion implantation simulation based on numerical solution of the Boltzmann transport equation

✍ I.E. Mozolevsky; V.I. Belko 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 518 KB

An algorithm for fast calculation of ion

An algorithm for fast calculation of ion range and damage distributions based on the boltzmann transport equation

✍ Lin Shao 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 307 KB

Boltzmann transport equation (BTE) method using large energy intervals in ion scattering calculations can lead to significant errors in the calculation of ion and damage distributions. We pointed out that the inaccuracy is caused by the fact that the flux distribution in a transited energy state is