✦ LIBER ✦
A multiple pass application of the Boltzmann transport equation for calculating ion implantation profiles at low energies
✍ Scribed by M.D. Giles; J.F. Gibbons
- Publisher
- Elsevier Science
- Year
- 1983
- Weight
- 299 KB
- Volume
- 209-210
- Category
- Article
- ISSN
- 0167-5087
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