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C2H6 as an active carbon source for a large scale synthesis of carbon nanotubes by chemical vapour deposition

โœ Scribed by Giuseppe Gulino; Ricardo Vieira; Julien Amadou; Patrick Nguyen; Marc J. Ledoux; Signorino Galvagno; Gabriele Centi; Cuong Pham-Huu


Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
860 KB
Volume
279
Category
Article
ISSN
0926-860X

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Chemical vapour deposition of the oxides
โœ Ryan C. Smith; Tiezhong Ma; Noel Hoilien; Lancy Y. Tsung; Malcolm J. Bevan; Luig ๐Ÿ“‚ Article ๐Ÿ“… 2000 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 340 KB ๐Ÿ‘ 3 views

A brief survey of the precursors used for the chemical vapour deposition of the dioxides of titanium, zirconium and hafnium is presented. The review covers precursors used for the closely related process known as atomic layer chemical vapour deposition (ALCVD or ALD). Precursors delivered by standar