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C-Nx thin films deposited by pulsed high energy plasma bombardment

✍ Scribed by Jun Peng; Yafai Zhang; Size Yang; Guanghua Chen

Book ID: 119125810
Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 275 KB
Volume: 27
Category: Article
ISSN: 0167-577X
DOI: 10.1016/0167-577x(96)80005-x

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