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Titanium nitride thin films deposited by reactive pulsed-laser ablation in RF plasma

✍ Scribed by A. Giardini; V. Marotta; S. Orlando; G.P. Parisi


Book ID
108422989
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
764 KB
Volume
151-152
Category
Article
ISSN
0257-8972

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