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C-axis orientation of AlN films prepared by ECR PECVD

✍ Scribed by Ju-Won Soh; Seong-Soo Jang; In-Seop Jeong; Won-Jong Lee

Book ID: 107864818
Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 647 KB
Volume: 279
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(95)08027-9

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